different acids or their blend according to the natures of target thin film.

to be used for etching the certain part of thin film. Etchants are approximately of Oxalic acid dihydrate

mainly used to etch the amorphous ITO layers.

Aqua Regia

A mixture of hydrochloric acid and nitric acid, to be used to etch crystalline ITO layers.

Al Etchant

A mixture of multiple acids, to be use to etch the Al layers.